EUGENE TECHNOLOGY CO., LTD.

Patent Owner

Watch Compare Add to Portfolio

Stats

Details

Patent Activity in the Last 10 Years

Technologies

Intl Class Technology Matters Rank in Class
 
  
 
C23C COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL 4259
 
  
 
H01L SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR 35327
 
  
 
C30B SINGLE-CRYSTAL GROWTH 749
 
  
 
H01J ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS 5123
 
  
 
C23F NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES 333
 
  
 
B05C APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL 144
 
  
 
C01B NON-METALLIC ELEMENTS; COMPOUNDS THEREOF178
 
  
 
F23Q IGNITION 116
 
  
 
F25B REFRIGERATION MACHINES, PLANTS, OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS 167
 
  
 
F27B FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS123

Top Patents (by citation)

Upgrade to the Professional Level to View Top Patents for this Owner. Learn More

Recent Publications

Publication # Title Filing Date Pub Date Intl Class
2017/0256,410 METHOD AND APPARATUS FOR DEPOSITING AMORPHOUS SILICON FILMMay 18, 17Sep 07, 17[C23C, H01L]
2017/0137,938 SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USING THE SAMEOct 10, 16May 18, 17[C23C]
2017/0110,347 SUBSTRATE SUPPORTING UNIT, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MANUFACTURING SUBSTRATE SUPPORTING UNITDec 29, 16Apr 20, 17[C23C, H01L]
2015/0337,460 SUBSTRATE-PROCESSING DEVICEJan 09, 14Nov 26, 15[C30B]
2015/0252,476 SUBSTRATE PROCESSING APPARATUSSep 17, 13Sep 10, 15[C23C]
2015/0228,518 FUME REMOVAL DEVICE AND SUBSTRATE TREATMENT DEVICESep 17, 13Aug 13, 15[H01J, H01L]
2015/0228,520 Substrate Transfer Robot and Substrate Processing Apparatus Using The SameJan 29, 15Aug 13, 15[H01L]
2015/0211,116 SUBSTRATE PROCESSING DEVICEAug 23, 13Jul 30, 15[C23C]
2015/0191,821 SUBSTRATE PROCESSING DEVICEAug 23, 13Jul 09, 15[C23C]
2015/0179,489 Substrate Processing Module, Substrate Processing Apparatus Including the same, and Substrate Transferring MethodDec 17, 14Jun 25, 15[C23C, H01L]

View all Publication..

Recent Patents

Patent # Title Filing Date Issue Date Intl Class
9875895 Substrate processing apparatus including exhaust ports and substrate processing methodNov 16, 12Jan 23, 18[C23C, H01L]
9869019 Substrate processing apparatus including processing unitNov 23, 12Jan 16, 18[C23C, H01J, H01L, C30B]
9818604 Method for depositing insulating film on recessed portion having high aspect ratioJun 16, 15Nov 14, 17[H01L]
9758870 Substrate treatment apparatus, and method for controlling temperature of heaterDec 18, 13Sep 12, 17[C23C, H01L, F25B]
9761473 Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unitAug 24, 12Sep 12, 17[C23C, H01L, C23F]
9741562 Method for forming polysilicon filmJan 27, 15Aug 22, 17[H01L]
9741574 Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor deviceSep 23, 14Aug 22, 17[C23C, H01L]
9721798 Method and apparatus for depositing amorphous silicon filmSep 15, 14Aug 01, 17[C23C, H01L]
9644895 Heater moving type substrate processing apparatusApr 03, 13May 09, 17[C23C, H01L, H05B, F27D, C30B]
9620395 Apparatus for processing substrate for supplying reaction gas having phase differenceNov 16, 12Apr 11, 17[C23C, H01L, C30B]

View all patents..

Expired/Abandoned/Withdrawn Patents

Patent # Title Status Filing Date Issue/Pub Date Intl Class
2015/0380,284 APPARATUS FOR PROCESSING SUBSTRATEAbandonedFeb 17, 14Dec 31, 15[H01L]
2015/0369,539 APPARATUS FOR PROCESSING SUBSTRATEAbandonedFeb 17, 14Dec 24, 15[H01L, F27B]
2015/0267,291 PURGE CHAMBER, AND SUBSTRATE-PROCESSING APPARATUS INCLUDING SAMEAbandonedNov 01, 13Sep 24, 15[C23C]
2015/0176,128 Substrate Processing ApparatusAbandonedDec 17, 14Jun 25, 15[C23C]
2014/0341,682 SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAMEAbandonedNov 23, 12Nov 20, 14[H01L]
2014/0209,024 EQUIPMENT FOR MANUFACTURING SEMICONDUCTORAbandonedJul 31, 12Jul 31, 14[H01L]
2014/0190,410 EQUIPMENT FOR MANUFACTURING SEMICONDUCTORAbandonedJul 31, 12Jul 10, 14[C30B]
2014/0174,357 EQUIPMENT FOR MANUFACTURING SEMICONDUCTORAbandonedJul 31, 12Jun 26, 14[C30B]
2014/0144,375 EQUIPMENT FOR MANUFACTURING SEMICONDUCTORAbandonedJul 31, 12May 29, 14[H01L]
2013/0186,337 SUBSTRATE PROCESSING DEVICE FOR SUPPLYING REACTION GAS THROUGH SYMMETRY-TYPE INLET AND OUTLETAbandonedOct 06, 11Jul 25, 13[H01L]
2013/0149,078 SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-TRANSFERRING METHODAbandonedAug 30, 11Jun 13, 13[H01L]
2013/0130,480 METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICEAbandonedSep 01, 11May 23, 13[H01L]
2013/0101,752 METHOD FOR DEPOSITING CYCLIC THIN FILMAbandonedAug 01, 11Apr 25, 13[B05D]
2012/0160,419 SUBSTRATE-SUPPORTING UNIT AND SUBSTRATE-PROCESSING APPARATUS COMPRISING SAMEAbandonedApr 12, 10Jun 28, 12[B23Q, C23C, B05C, H01L]
2012/0040,520 ULTRA-FINE-GRAINED POLYSILICON THIN FILM VAPOUR-DEPOSITION METHODAbandonedApr 12, 10Feb 16, 12[H01L]
2011/0294,284 METHOD FOR DEPOSITING ULTRA FINE GRAIN POLYSILICON THIN FILMAbandonedApr 29, 09Dec 01, 11[H01L]
2011/0136,328 METHOD FOR DEPOSITING ULTRA FINE GRAIN POLYSILICON THIN FILMAbandonedApr 29, 09Jun 09, 11[C23C, H01L]
2011/0111,582 METHOD FOR DEPOSITING ULTRA FINE GRAIN POLYSILICON THIN FILMAbandonedApr 29, 09May 12, 11[H01L]
2011/0014,397 APPARATUS AND METHOD FOR PROCESSING SUBSTRATEAbandonedFeb 20, 09Jan 20, 11[C23C]
2011/0000,618 APPARATUS AND METHOD FOR PROCESSING SUBSTRATEAbandonedFeb 20, 09Jan 06, 11[H01L, C23F]

View all patents..

Top Inventors for This Owner

Upgrade to the Professional Level to View Top Inventors for this Owner. Learn More

We are sorry but your current selection exceeds the maximum number of comparisons () for this membership level. Upgrade to our Level for up to -1 comparisons!

We are sorry but your current selection exceeds the maximum number of portfolios (0) for this membership level. Upgrade to our Level for up to -1 portfolios!.